ZnO:Al(ZAO)是一种简并半导体氧化物薄膜材料,具有高的载流子浓度和大的光学禁带宽度.因而具有优异的电学和光学性能,极具应用价值.对于其能级高度简并的ZAO半导体薄膜材料.在较低的温度下.离化杂质散射占主导地位:在较高的温度下,晶格振动散射将成为主要的散射机制;晶界散射仅当晶粒尺寸较小(与电子的平均自由程相当)时才起作用.本文介绍了ZAO薄膜的制备方法、晶体结构特性、电学和光学性能以及载流子的散射机制.
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