用双离子束溅射法在玻璃基片上制得了Fe-Ni-N薄膜,研究了Ni含量、主源气氛及退火温度对Fe-Ni-N薄膜的结构、磁性及热稳定性的影响,选择合适的工艺条件,可制得在(100)面方向有100%晶粒取向度的单一γ′-(Fe,Ni)4N相.Ni含量为6.7%(摩尔分数)的Fe-Ni-N薄膜具有较好的软磁性能,其饱和磁化强度Ms为2.04 T,矫顽力Hc为0.68 kA/m.但是随着Ni含量的提高,Fe-Ni-N薄膜的热稳定性下降在主源气压比PN2/PAr较低时,有利于氮含量较低的γ'相的形成,在较高的PN2/PAr条件下,则形成氮含量较高的ε-(Fe,Ni)2～3N相和ξ-(Fe,Ni)2N相.
参考文献
| [1] | Hui Xu, Kai-yuan He, Li-zhi Cheng, "Changes of structure and magnetic properties for a mixture of α-Fe and Fe3N powders during mechanical alloying process ", J.Magn. Magn. Mater., 174, 316(1997) |
| [2] | T.Yamaguchi, M.Sakita, M.Nakamura, T.Kobira, "Synthesis and characteristics of Fe4N powders and thin films ", J.Magn. Magn. Mater., 215, 529(2000) |
| [3] | N.D.Telling, G.A.Jones, C.A.Faunce, P.J.Grundy, H.J.Blythe, D.E.Joyce, "Microstructure of Fe-N thin films prepared using an ato mic nitrogen beam ", J.Vac. Sci.Technol., 19, 405(2001) |
| [4] | Zhuge Lanjian(诸葛兰剑),Guo Zhitian(郭治天),Wu Xuemei(吴雪梅),Tang Naiyun(汤乃云),Ye Chunnuan(叶春暧),Yao Weiguo(姚伟国),"Solid reaction between α-Fe powders and m-phenylene diamine induced by ball milling",Chin.J.Mater.Res.(材料研究学报),16(1),109(2002) |
| [5] | N.X.Sun, S.X.Wang, "Soft high saturation magnetization (Fe0.3Co0.3)1-XNX thin films for inductive write heads ", IEEE Trans. Magn., 36, 2506(2000) |
| [6] | P. Zou, J.A.Bain, "Residual stress optimization in FeA1N pole materials ", IEEE Trans. Magn., 36,2536(2000) |
| [7] | S.C.Byeon, Y.Ding, C.J.Alexander, J.A.Barnard, W.D.Doyle, "High moment FeTiN thin films for high density recording heads ", IEEE Trans. Magn., 36, 2502(2000) |
| [8] | Dong-Liang Peng, Kenji Sumiyama, Kenji Suzuki, "Thermomagnetic behaviors of Fe-Cr-N films with perpendicular magnetic anisotropy ", J. Alloys Compounds, 265, 49(1998) |
| [9] | M.Chiba, K.Morio, Y.Koizumi, "Magnetic properties and microstructure of Ni-Fe nitride films by reactive sputtering ", J.Magn. Magn. Mater., 242, 949(2002) |
| [10] | X.G.Diao, A.Y.Takeuchi, F.Garcia, R.B.Scorzelli, "Magnetic properties of perovskite-type Fe-Ni nitrides γ'-(Fe1-XNiX)4N (0≤x≤0.9) ", J.Appl. Phys., 85, 4485(1999) |
| [11] | D.L.Peng, K.Sumiyama, M.Oku, D.X.Li, K.Suzuki, "Structure and magnetic properties of Fe-Ti-N films Deposited by DC magnetron facing target sputtering ", Phys. Stat. Sol. (a)157, 139(1996) |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%