用溶胶-凝胶法制备SnO2前驱液,然后用提拉法分别在单晶Si和Al2O3基片表面制备出SnO2前驱膜,再用脉冲Nd:YAG激光烧结前驱膜使其转变为晶体SnO2薄膜.用XRD分析了单晶Si表面的SnO2薄膜,研究激光功率对SnO2薄膜相组成的影响.TEM观察表明,激光烧结后的薄膜SnO2颗粒均匀,直径约为10 nm.用激光烧结法制备的SnO2薄膜对浓度为1.80×10-4丙酮的最高灵敏度为30～40,明显高于用传统烧结法制备的SnO2薄膜的灵敏度.激光烧结能降低薄膜具有最高灵敏度的工作温度.
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