采用硝磷酸(NP)背表面刻蚀工艺并结合真空共蒸发法分别沉积了几种背接触层材料,研究了NP腐蚀对CdTe薄膜性能及背接触层的影响.结果表明:NP腐蚀后在CdTe薄膜上产生了富碲层;退火后,碲容易与背接触材料中的铜反应生成CuxTe.通过严格控制和优化腐蚀工艺,选择ZnTe/ZnTe:Cu作为背接触层材料,可制备出优异性能的CdTe太阳电池.
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