在原子层淀积的A12O3薄膜表面自组装生长Au纳米颗粒,研究了Au纳米颗粒的自组装过程和热稳定性,结果表明,原子层淀积的A12O3薄膜表面很容易吸附氨丙基三甲基硅烷(APTMS),有利于Au纳米颗粒的自组装,生长出的Au纳米颗粒尺寸为5-8 nm,密度约为4x1011cm-2,在300℃氮气中退火使Au纳米颗粒的尺寸增大,但是没有改变APTMS的吸附状态和Au的化学组成.当退火温度提高到450℃时,Au纳米颗粒发生明显的团聚,且分布变得极不均匀.
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