使用等离子体浸没离子注入与沉积(PIII&D)技术在轴承钢基体表面合成类金刚石(DLC)薄膜,研究了薄膜的结构和性能,结果表明,所制备的DLC薄膜主要是由金刚石键(sp3)和石墨键(sp2)组成的混合无定形碳,且sp3键含量大于10%,DLC膜层致密均匀,与基体结合良好,DLC膜具有很高的硬度和杨氏模量,分别达到40 GPa和430 GPa;其最低摩擦系数由基体的0.87下降到0.2,被处理薄膜试件在90%置信区间下的L10、L50、La和平均寿命L较基体分别延长了10.1倍、4.2倍、3.5倍和3.4倍,PIII&D轴承钢滚动接触疲劳寿命的分散性得到了显著改善.
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