利用电弧离子镀技术在不锈钢基体上沉积了Ti-Al-N涂层, 研究了沉积工艺参数对沉积态涂层的成分及相组成的影响, 以及在不同退火处理条件下各涂层组织的变化. XRD结果表明, 通过改变沉积工艺参数可以控制沉积态涂层的成分, 使涂层经退火后生成Ti2AlN相. 适当成分的沉积态涂层退火生成Ti2AlN相所需的最低退火温度为650℃, 其它沉积态涂层在700℃或更高温度下退火才能生成Ti2AlN相; 退火过程中可能发生的化学反应为: AlTi3N+5Al→TiN+2Al3Ti和AlTi3N+3Al→Ti2AlN+Al3Ti. 此外, 延长退火时间可使相同工艺下的沉积涂层生成的Ti2AlN相含量略有增加. 利用SEM对涂层进行了分析, 测量了涂层的摩擦系数.
Ti–Al–N coatings with different Ti, Al and N contents were deposited on 1Cr18Ni9Ti stainless steel substrate by vacuum cathode arc ion plating (AIP) method and the as–deposited coatings were annealed under different conditions. The compositions and phases in the as–deposited coatings were lso analyzed and compared. The XRD results showed that the composition of the coatings could be controlled by changing the deposition parameters and dstinct Ti2AlN phase existed in the annealed coatings. The Ti2AlN phase could not appear unless the annealing temperature reached 650 ℃. The reactions during the annealing process can be descrbed as AlTi3N+5Al→TiN+2Al3Ti and AlTi3N+3Al→Ti2AlN+Al3Ti. The content of Ti2AlN phase increased slightly by extending the annealing time. The surface morphology and composition of he annealed coating were analyzed by SEM and the friction coefficient of the coating was measured.
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