通过非平衡磁控溅射的方法制备了不同C含量的ZrCN复合薄膜, 采用XPS, XRD, SEM, AFM, 纳米压痕仪和摩擦磨损仪等对薄膜的化学成分、微结构、表面形貌、力学性能及摩擦磨损性能进行了研究. 结果表明, ZrCN薄膜中(C+N)/Zr原子比对薄膜的相组成、微结构和力学性能都有很大的影响. 当(C+N)/Zr原子比小于1时, C进入ZrN的晶格间隙并形成Zr(C, N)固溶体. 而当(C+N)/Zr原子比大于1时, 多余的C形成非晶态的CN或单质C, ZrCN复合膜呈fcc结构. 随着C含量升高, ZrCN复合膜的硬度先增大后减小, 而摩擦系数逐渐减小, 磨损所产生的磨痕逐渐变窄、变浅. C的加入使得ZrCN复合膜的摩擦磨损形式发生改变, 摩擦磨损性能得到提高. 含C量为13.2%的ZrCN薄膜硬度达到31 GPa, 摩擦系数仅为0.26, 综合具备了硬度高、摩擦磨损性能好的优良特点.
ZrCN thin films with different C contents were deposited by reactive unbalanced magnetron sputtering. Their chemical composition, microstructure, surface morphology, mechanical and tribological properties were investigated by XPS, XRD, SEM, AFM, nanoindentation and tribometer. The results indicated that the atomic ratios of (C+N)/Zr played an important role in phase configuration, microstructure, mechanical and tribological properties. When the ratio was less than 1, a Zr(C, N) solid solution was formed due to the dissolution of C into the ZrN lattice. When the ratio was larger than 1, the amorphous phase CN and C appeared and the ZrCN thin films had a fcc crystal structure. As the C contents increased, the diffraction peak decreased and widen, and the hardness of ZrCN thin films increased first and then decreased. As the C contents increased, the coefficient of friction of ZrCN thin films decreased and the wear scar became more shallower and narrower. The incorporation of C changed the wear mode and improved the friction and wear behaviors. The hardness of ZrCN film reached 31 GPa and friction coefficient was 0.26 when C content was 13.2%.
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