采用射频磁控溅射制备不同Mo含量的TiMoN薄膜.利用XRD,SEM,EDS,纳米压痕仪和高温摩擦磨损实验对薄膜的相结构,形貌,成分,力学性能和摩擦磨损性能进行分析.结果表明,TiMoN薄膜为fcc结构；当Mo占金属元素总量的比例X ＜68.37％(原子分数)时,薄膜主要为Mo在TiN中的置换固溶体；当X＞68.37％时,薄膜主要为Ti在MO2N中的置换固溶体；随Mo含量的增高,择优取向发生改变,晶粒尺寸逐渐减小,薄膜的显微硬度显著升高,最高达36.37 GPa,摩擦系数逐渐降低,并在X达到68.37％后稳定在0.4左右；不同Mo含量的TiMoN薄膜的磨损率在10-8-10-6 mm2/N之间,优于TiN薄膜.基于晶体化学理论,对TiMoN薄膜低摩擦系数的原因进行了讨论.
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