利用改良型硫酸盐- 氯化物镀液体系,进行了晶圆级Fe-Ni凸点下金属层(UBM)电镀工艺的开发研究.研究了镀液中Fe2+含量、电镀温度及电流密度对镀层成分的影响规律,得到了特定工艺条件下镀层成分控制的完整曲线；测量了不同电镀时间和不同电流密度下的镀层生长速率,为实际生产中控制UBM镀层的厚度提供了依据；利用XRD和TEM对镀层的晶体结构及微观形貌进行了表征；利用滴定、等离子体发射光谱(ICP)等手段,对镀液在生产及静置条件下主盐离子浓度的变化趋势进行了监测,测定了抗坏血酸在镀液体系中与Fe3+的反应能力,提出了镀液的日常维护、保存、调控方案以及Fe3+的抑制方案.
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