采用二次铝阳极氧化技术, 制备了高度有序的铝阳极氧化膜(AAO膜), 孔径为50nm. 利用纳米压缩仪结合纳米压痕仪对不同压缩位移条件下的AAO膜进行了纳米力学测试和卸载后的压痕原位扫描实验. 通过测量加载-卸载曲线并用Oliver-Pharr模型分析计算得到, 在压缩位移为0、3.3、6.6、9.9μm时, AAO膜的纳米硬度和弹性模量分别为1.49、1.79、1.69、1.55GPa和11.79、12.32、12.82、13.19GPa. 由卸载曲线和原位扫描的压痕形貌可以看出, 压缩位移为6.6和9.9μm时的压痕在压缩力的作用下发生了明显的塑性变形, 因而AAO膜的纳米硬度减小, 而弹性模量一直增大.
The highly ordered anodic aluminium oxide film, namely, AAO film was prepared with the electrochemical anodization method. On-line nanomeasurement and in-situ scanning functions were conducted by the nanocompression instrument cooperated with nanoindenter. The results show that the nanohardness of AAO film with 50nm hole at 0, 3.3, 6.6, 9.9μm compression displacement is 1.49, 1.79, 1.69, 1.55GPa and the elastic modulus is 11.79, 12.32, 12.82, 13.19GPa. The indentations at 6.6, 9.9μm compression displacement appear obvious plastic deformation produced by the compression force as indicated by the load versus displacement curve and indentation surface morphology, so the nanohardness decreases while the elastic modulus increases all through.
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