采用微波等离子体化学气相沉积（MPCVD）方法制备了100μm米厚高质量(100)定向金刚石薄膜. 利用(100)定向金刚石薄膜成功制备了α粒子探测器, -100V偏压下电荷平均收集效率为37.7%, 最大的电荷收集效率达到60%以上. 在此基础上, 通过在α粒子探测器条状电极面蒸镀一层合适厚度的硼(10B)膜转化层, 成功研制了金刚石中子探测器. 镀硼之后探测器对中子有明显的响应, 在1V/μm电场下, 对252Cf中子的能量分辨率达到9.3%,探测效率达到1.67%. 同时还研究了电场强度和硼(10B)层厚度对器件探测效率的影响规律. 在厚度<1.5μm时, 随着厚度的增加, 探测效率上升, 当厚度>1.5μm时, 探测效率下降.
High quality (100)-oriented diamond film was prepared by Microwave Plasma Chemical Vapor Deposition (MPCVD) with thickness of 100μm. A α-particle detector was successfully made on the prepared film. The charge collection efficiency is 37.7% under -100V bias in average while the maximum reaches 60%. On the basis of this, diamond neutron detector is successfully developed by evaporating a layer of 10B converter with a proper thickness on the surface with an evidently increased response to α particle. At the electric field of 1V/μm, the energy resolution is 9.3%, the detecting efficiency to 252Cf neutron is 1.67%. Electric field and converter thickness have influences on the detecting efficiency. With the converter thickness increasing, the detecting efficiency increases, when the thickness reaches 1.5μm, the deteting efficiency turn to decrease.
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