用脉冲偏压电弧离子镀方法在保持石墨靶弧流恒定的条件下,通过同步改变锆靶弧流与氮流量,在硬质合金基体上制备了一系列不同成分的C1-x-yNxZry复合薄膜.随着锆靶弧流与N流量增加,薄膜中Zr与N含量都呈线性增加,同时C含量快速减少.Raman光谱显示所制备的薄膜具有DLC特征,而XRD结果显示薄膜中还存在有明显的ZrN晶体相,说明本实验所制备的薄膜属于在DIE非晶基体上匹配有ZrN晶体相的碳基复合薄膜.随Zr与N含量增加,薄膜硬度先增大后降低,当x=0.19,y=0.28时薄膜具有最高硬度值,为43.6GPa,达到了超硬薄膜的硬度值.
参考文献
| [1] | Robertson J.Diamond-like amorphous carbon.Materials Science and Engineering R,2002,37(4/5/6):129-281. |
| [2] | Hainsworth S V,Uhure N J.Diamond like carbon coatings for tribology:production techniques,characterization methods and applications.International Materials Reviews,2007,52(3):153-174. |
| [3] | Robertson J.Improving the properties of diamond-like carbon.Diamond and Related Material,2003,12(2):79-84. |
| [4] | Liu E,Shi X,Tan H S,et al.The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc.Surface and Coatings Technology,1999,120-121:601-606. |
| [5] | Tan M L,Zhu J Q,Han J C,et al.Raman characterization of boron doped tetrahedral amorphous carbon films.Materials Research Bulletin,2008,43(2):453462. |
| [6] | Lee C S,Lee K R,Eun K Y,et al.Structure and properties of Si incorporated tetrahedral amorphous carbon films prepared by hybrid filtered vacuum arc process.Diamond and Related Materials,2002,11(2):198-203. |
| [7] | Singh V,Jiang J C,Meletis E I.Cr-diamondlike carbon nanocom-posite films; Synthesis,characterization and properties.Thin Solid Films,2005,489(1/2):150-158. |
| [8] | Wang D Y,Chang C L,Ho W Y.Oxidation behavior of diamond-like carbon films.Surface and Coatings Technology,1999,120-121:138-144. |
| [9] | Inkin V N,Kirpilenko G G,Dementjev A A,et al.A superhard diamond-like carbon film.Diamond and Related Materials,2000,9 (3-6):715-721. |
| [10] | Byon E,Kim J K,Rha J J,et al.Effect of metal ion implantation on thermal instability of diamond-like carbon films.Surface & Coatings Technology,2007,201(15):6670-6673. |
| [11] | Chen C C,Hong F C N.Structure and properties of diamond-like carbon nanocomposite films containing copper nanoparticles.Applied Surface Science,2005,242(3/4):261-269. |
| [12] | Veprek S,Reiprich S.A concept for the design of novel superhard coatings.Thin Solid Films,1995,268(1/2):64-71. |
| [13] | Musil J.Hard and superhard nanocomposite coatings.Surface and Coatings Technology,2000,125(1/2/3):322-330. |
| [14] | Ferrari A C,Robertson J.Interpretation of Raman spectra of disordered and amorphous carbon.Physical Review B,2000,61(20):14095-14107. |
| [15] | 蒋娜娜,邵天敏,陈大融(JIANG Na-Na,et al).利用脉冲激光真空弧沉积技术制备类金刚石薄膜.无机材料学报(Journal of Inorganic Materials),2005,20(1):187-192. |
| [16] | Ferrari A C.Determination of bonding in diamond-like carbon by Raman spectroscopy.Diamond and Related Materials,2002,11(3-6):1053-1061. |
| [17] | Tay B K,Cheng Y H,Ding X Z,et al.Hard carbon nanocomposite films with low stress.Diamond and Related Materials,2001,10(3-7):1082-1087. |
| [18] | Zhang S,Sun D,Fu Y Q,et al.Recent advances of superhard nanocomposite coatings; a review.Surface and Coatings Technology,2003,167(2/3):113-119. |
| [19] | 赵红雨,范秋林,宋力昕.等(ZHAO Hong-Yu,et al).纳米复合超硬薄膜的研究现状.无机材料学报(Journal of Inorganic Materials),2004,19(1):9-16. |
| [20] | Veprek S.The search for novel,superhard materials.Journal of Vacuum Science and Technology A,1999,17(5):2401-2420. |
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