采用脉冲激光淀积法在硅基氧化铝纳米有序孔膜版介质上(膜版孔径平均尺寸25 nm,内生长Pt纳米线作为底电极一部分)制备了纳米结构的BaTiO3铁电膜(膜厚25nm),并对其铁电和介电性能以及微结构进行了表征.结果表明,BaTiO3铁电纳米膜的介电常数随着测量频率的增加(103～106 Hz)从196缓慢下降到190;介电损耗在低频区域(103～105 Hz)从0.005缓慢增加到0.007,而在高频率区域(＞105 Hz)快速增加到0.013.薄膜的剩余极化强度约为5μC/cm2,矫顽场强约为680 kV/cm.剖面(S)TEM像表明,BaTiO3铁电纳米膜与Pt纳米线(底电极)直接相连,它们之间的界面具有一定程度的弯曲.为兼顾氧化铝纳米有序孔膜版内的金属纳米线有序分布及BaTiO3纳米膜的结晶度,选择合适的退火温度是制备工艺中的关键因素.
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