为提高TFA-MOD工艺制备YBCO薄膜的生产效率, 实验采用了丙烯酸盐对传统三氟乙酸盐进行部分替换. 由于前驱溶液中氟含量的减少, 低温预处理过程升温速率可达到300℃/h; 并通过对低温预烧工艺中气氛的调整, 避免了增稠剂二乙醇胺的添加对薄膜质量造成的不利影响, 使其添加上限达到0.75g/5mL. 经过工艺改进, 单次涂膜厚度可达到1μm. 虽然由于厚度的增加, 表面有a轴晶粒出现, 但薄膜内部仍具有较优的微观结构. 其临界电流密度(Jc)及临界转变温度(Tc)分别达到3.5MA/cm2和90K.
To elevate the productivity of high critical current YBCO superconducting films by TFA-MOD processing, traditional trifluoroacetate (TFA) was replaced by acrylic acetate partially. Since the fluorine content in precursor solution was decreased, the ramping rate in decomposition process reached 300℃/h. Meanwhile the atmosphere was also adjusted to avoid the fatal effect of diethanolamine (DEA), and to increase thickness of YBCO film. By increasing the maximum of DEA addition to 0.75g/5mL, the thickness of film reaches 1μm. While some a-axis grains dispersed on the film surface are probably ascribed to the rise of thickness, the YBCO film has good interior microstructures overall. As a result, the highest critical current density is 3.5MA/cm2 and the critical temperature is 90K as well.
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