为研究环境温度对含氢无定形碳(a-C∶H)膜结构和性能的影响,将a-C∶H膜在大气环境中进行高温退火处理,并借助红外光谱、拉曼光谱、X射线光电子能谱、3D表面分析仪和球盘摩擦试验机等手段对退火前后a-C∶H膜的结构、组成和性能进行了系统地考察.研究发现,在较低的退火温度下(300℃),a-C∶H膜结构无明显变化,而其内应力降低,摩擦学性能显著提高;在400℃和500℃下退火,膜结构发生明显变化并伴随严重氧化,同时摩擦学性能降低甚至完全失效.结果表明,退火温度的选择对a-C∶H膜的结构、组成及性能具有重要影响.
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