碳纳米管(CNT)由于其独特结构和优异特性已被广泛用来构筑各种纳米器件. 而CNT与电极间的接触在CNT器件中扮演着重要的作用, 是器件性能的关键影响因素. 采用何种有效的方法来改善CNT与金属电极间的接触一直是CNT器件研究中的一个重要方面. 本文综述了近年来CNT/金属接触改善方法的研究进展, 结合本课题组的研究对目前有代表性的接触改善方法进行介绍. 阐述了各种改善方法的原理和加工工艺, 讨论了采用这些方法获得的接触特性和器件性能, 并对各方法的特点进行了比较.
Due to its unique structure and excellent properties, carbon nanotube (CNT) has been widely used to construct various nanodevices. The contact between CNTs and metal electrodes plays a key role in CNT-based devices and directly influences device performance. Therefore, the improvement of the CNT/electrode contact is an important aspect in the study of CNT devices. In this paper, recent research progress on the improvement methods of the CNT/metal contact is reviewed. Typical contact optimization methods and their principles and processes are introduced. The resulting contact characteristics and device performances by applying these improvement methods are also discussed. On this basis, the features of these different improvement methods are compared.
参考文献
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