在硅酸盐光学玻璃基片上制作了光波导堆栈,这种光波导堆栈通过Ag+/Na+熔盐离子交换和电场辅助离子扩散技术顺次制作了两层掩埋式光波导.对光波导堆栈的横截面显微结构进行了观察,并对堆栈中两层波导的损耗特性进行了测试.所获得的光波导堆栈中的上、下两层波导芯部分别位于玻璃表面以下14和35 μm处；上层光波导芯部尺寸约为12 μm×7 μm;下层光波导芯部尺寸约为9μm×8 μm.通光测试显示两层波导在1.55 μm工作波长下均为单模光波导,且两者之间没有相互耦合.损耗测试分析结果显示:堆栈中两层光波导的传输损耗均约为0.12 dB/cm,与单模光纤之间的耦合损耗分别为0.78和0.73 dB.分析表明,这种光波导堆栈在玻璃基集成光芯片的高密度集成方面具有很好的应用前景.
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