采用电子束蒸发镀膜技术, 结合磁控滚动方法在Φ1 mm的钢球基底上制备碳化硼球面膜层, 通过退火、打孔及腐蚀获得碳化硼空心微球. 主要研究了球面膜层的宏观形貌、微观结构、成分及初步探讨了不同退火温度(800~1100℃)对核膜结构空心化的影响. 利用扫描电子显微镜(SEM)、X射线光电子能谱分析(XPS)、原子力显微镜(AFM)对球面薄膜表面形态和薄膜元素组成进行了分析. 结果表明: 磁控滚动模式制备的球面膜层表面平整, 没有裂纹和孔洞, 元素分布均匀. 核膜结构(镀膜时间在5~70 h)经900℃以上温度退火, 空心化后的球面膜层可实现自支撑, 900℃退火的微球表面形貌最好, 壁厚可达10 μm以上.
Boron carbide spherical-films were prepared by electron-beam evaporation deposition technique on steel ball substrates,combined with a independently designed magnetron rolling method. The boron carbide micro-shell was obtained after sintering, drilling and corrosion. The microcosmic appearance, microstructure, morphology, element composition of the boron carbide spherical films were investigated. The effect of annealing temperature (800–1100℃) on the boron carbide hollow micro-shells was also studied. The products were characterized by scanning electron microscope (SEM), X-ray photoelectron spectroscope (XPS), atomic force microscope (AFM). The results show that the film is dense without any cracks and pores. Besides, the elemental distribution is well-proportioned. When the annealing temperature is over 900℃, the coating is self-standing formed into a hollow microsphere. The hollow microsphere annealed at 900℃ has the best micro appearance with a thickness over 10 μm.
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