在硅基太阳能电池表面制备减反层可以有效降低硅表面的反射率,提高吸收率,从而提高硅基太阳能电池的光电转换效率.本研究利用四甲基氢氧化铵(Tetramethyl Ammonium Hydroxide TMAH)溶液对(100)单晶硅进行各向异性腐蚀,在表面腐蚀出金字塔结构,得到了最低为6％左右的反射率.然后采用水热法在该衬底生长氧化锌纳米棒,得到了最低小于3％的反射率,比单采用腐蚀或者ZnO纳米棒生长的硅表面的反射率更低.这种减反方法工艺简单、高效,有望得到应用.
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