PEALD原位掺杂制备纳米TiO2-xNx光催化剂

无机材料学报, 2013, 28(7): 691-695. doi: 10.3724/SP.J.1077.2013.12490

PEALD原位掺杂制备纳米TiO2-xNx光催化剂

饶志鹏 ^1, , 万军 ^2, , 冯嘉恒 ^3, , 李超波 ^4, , 夏洋 ^5,

1.中国科学院微电子研究所,微电子器件与集成技术重点实验室,北京100029

2.中国科学院微电子研究所,微电子器件与集成技术重点实验室,北京100029

3.中国科学院微电子研究所,微电子器件与集成技术重点实验室,北京100029

4.中国科学院微电子研究所,微电子器件与集成技术重点实验室,北京100029

5.中国科学院微电子研究所,微电子器件与集成技术重点实验室,北京100029

基金项目: 国家科技重大专项(2009ZX02037-003) China Postdoctoral Science Foundation(2011M500996) 中国博士后科学基金(2011M500996) Opening Project of Key Laboratory of Microelectronics Devices & Integrated Technology,Institute of Microelectronics,Chinese Academy of Sciences 中国科学院微电子器件与集成技术重点实验室基金.National Science and Technology Major Project(2009ZX02037-003)

关键词：等离子体增强原子层沉积 , 原位 , TiO2-xNx , 光催化剂

Preparation of Nano-scaled TiO2-xNx Photocatalyst by PEALD in-situ Doping

Keywords： PEALD , in-situ , TiO2-xNx , photocatalyst

采用等离子体增强型原子层沉积(PEALD)系统原位掺杂制备了TiO2-xNx光催化剂.利用光电子能谱(XPS)、高分辨率透射电镜(HRTEM)、光致发光(PL)光谱和紫外-可见光(UV-Vis)光谱对催化剂进行了表征,并研究了TiO2-xNx纳米薄膜在可见光照射下水接触角的变化和催化降解亚甲基橙(MO)溶液的性能.结果表明,等离子体功率变化可以改变掺入氮原子的结构,在功率为50W时主要形成替换式氮原子,含量约为1.22at％,晶体为锐钛矿(101)型.结构无明显缺陷,且掺杂后TiO2-xNx薄膜光生电子-空穴对复合率低,有利于光催化效率的提高.该方法解决了传统ALD工艺制备TiO2-xNx光催化剂时容易形成氧空位的问题,实现了TiO2-xNx纳米材料的可见光(λ＜800 nm)吸收和可见光光催化性能.

参考文献

[1]	Linsebigler A L,Lu G,Yates J T.Photocatalysis on TiO2 surfaces:principles,mechanisms,and selected results.Chem.Rev.,1995,95(3):735-758.
[2]	Pore V,Rahtu A,Leskela M,et al.Atomic layer deposition of photocatalytic TiO2 thin films from titanium tetramethoxide and water.Chem.Vap.Deposition,2004,10(3):143-148.
[3]	Fujishima A,Rao T N,Tryk D A.Titanium dioxide photocatalysis.J.Photochem.Photobiol.C:Photochem.Rev.,2000,1(1):1-21.
[4]	Choi W,Termin A,Hoffmann M R.The role of metal Ion dopants in quantum-sized TiO2:correlation between photoreactivity and charge carrier recombination dynamics.J.Phys.Chem.,1994,98(51):13669-13769.
[5]	Dvoranova D,Brezova V,Mazur M,et al.Investigations of metal-doped titanium dioxide photocatalysts.Appl.Catal.B Environ.,2002,37(2):91-105.
[6]	Asahi R,Morikawa T,Ohwaki T,et al.Visible light photocatalysis in nitrogen doped titanium oxides.Science,2001,293(5528):269-271.
[7]	Li Y H,Cao W B,Wei Y,et al.Preparation of nitrogen-doped nano-TiO2 powers.Journal of Inorganic Material.2006,21(5):1067-1072.
[8]	Mei L F,Liang K M,Wang H E.N-doping TiO2 thin film prepared by heat treatment in electric field.Catal.Commun.,2007,8(8):1187-1190.
[9]	Huang D G,Liao S J,Liu J M,et al.Preparation of visible-light responsive N-F-codoped TiO2 photocatalyst by a Sol-Gel-solvothermal method.J.Photochem.Photobiol.A:Chem.,2006,184(3):282-288.
[10]	Cong Y,Zhang J L,Chen F,et al.Synthesis and characterization of nitrogen-doped TiO2 nanophotocatalyst with high visible light activity.J.Phys.Chem.C.,2007,111(19):6976-6982.
[11]	Wang H Q,Yah J P,Chang W F,et al.Practical synthesis of aromatic amines by photocatalytic reduction of aromatic nitro compounds on nanoparticles N-doped TiO2.Catal.Commun.,2009,10(6):989-994.
[12]	Pore V.Atomic Layer Deposition and Photocatalytic Properties of Titanium Dioxide Thin Films.Finland:University of Helsinki,doctoral dissertation,2010.
[13]	Pore V,Heikkila M,Ritala M,et al.Atomic layer deposition of TiO2-xNx thin films for photocatalytic applications.J.Photochem.Photobio.A:Chem.,2006,177(1):68-75.
[14]	Cheng H E,Chen Y R,Wu W T,et al.Effect of nitrogen doping concentration on the properties of TiO2 films grown by atomic layer deposition.Mater Sci.Eng.B,2011,176(7):596-599.
[15]	Sato J,Kobayashi H,Inoue Y.Photocatalytic activity for water decomposition of indates with octahedrally coordinated d10 configuration.(Ⅱ).roles of geometric and electronic structures.J.Phys.Chem.B,2003,107(31):7970-7975.
[16]	Zhang Z Z,Wang X X,Long J L,et al.Nitrogen-doped titanium dioxide visible light photocatalyst:Spectroscopic identification of photoactive centers.J.Catal.,2010,276(2):201-214.

上一张下一张

计量

下载量()
访问量()

作者相关

文章评分

您的评分：
1

0%
2

0%
3

0%
4

0%
5

0%

材料期刊网