采用金属有机物分解法制备了不同K含量的弛豫型压电薄膜(1-x)Na0.5Bi0.5TiO3-xK0.5Bi0.5TiO3(NBT-KBT100x).利用压电力显微镜研究了外场条件下纳米级铁电畴翻转,以及保持性能和印记失效.结果表明:(1)不同组分中,NBT-KBT17薄膜单畴态的晶粒个数最多.选取NBT-KBT17薄膜分别测试了其面内极化分量和面外极化分量,该薄膜的面内压电信号较强,这说明薄膜在d31模式下的压电响应明显.(2)选择NBT-KBT17薄膜中较大尺寸的单晶,实现了对弛豫性铁电体的电畴写入.将其在大气环境下放置不同时间,出现了退极化现象,但总的畴态稳定,表明其保持性能较好.(3)制备了NBT-KBT17原理型薄膜电容器,分别测试了加载作用前后NBT-KBT17薄膜电容器的相位和振幅滞后回线图.结果表明外加作用力使相位回线向右发生了一定的移动,且振幅的蝶形曲线均在不同方向上发生了偏移,同时形状也发生了改变.最后,利用空间电荷原理分析了外加力导致薄膜印记产生的机理.
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