GaN基LED图形衬底的性能研究

无机材料学报, 2013, 28(8): 869-874. doi: 10.3724/SP.J.1077.2013.12550

GaN基LED图形衬底的性能研究

李程程 ^1, , 徐智谋 ^2, , 孙堂友 ^3, , 王智浩 ^4, , 王双保 ^5, , 张学明 ^6, , 彭静 ^7,

1.华中科技大学光学与电子信息学院,武汉,430074

2.华中科技大学光学与电子信息学院,武汉,430074

3.华中科技大学光学与电子信息学院,武汉,430074

4.华中科技大学光学与电子信息学院,武汉,430074

5.华中科技大学光学与电子信息学院,武汉,430074

6.华中科技大学光学与电子信息学院,武汉,430074

7.武汉科技大学理学院,武汉,430081

基金项目: 国家自然科学基金(61076042、60607006) National Natural Science Foundation of China(61076042, 60607006) 华中科技大学校基金(HUST:2011TS119) 国家863计划(2011AA03A106) 国家重大科学仪器专项(2011YQ16000205) National High Technology Research and Development Program of China (863 Program)(2011AA03A106) Huazhong University of Science and Technology Fund(HUST:2011TS119) Special Project on Development of national key scientific instruments and equipment of China(2011YQ16000205)

关键词： GaN基LED , FDTD , 图形衬底 , 纳米压印

Research for Patterned Sapphire Substrates of GaN-based LEDs

Keywords： GaN-based LED , FDTD , patterned sapphire substrates , nano-imprint

蓝宝石图形衬底可以降低外延位错密度并增强背散射光,已经成为制备高亮LED有效技术手段.本研究运用时域有限差分(FDTD)法模拟和比较了GaN基微纳米图形衬底LED几种衬底图形结构对光的提取效率的影响.模拟结果显示纳米图形衬底(NPSS)对光效的提高明显优于微米图形衬底(MPSS).在对圆柱、圆孔、圆台、圆锥和曲面锥等纳米结构的研究中,圆台柱结构的纳米图形衬底对光提取效果最好.通过进一步模拟优化,得到圆台结构的最佳参数,此时相对于普通衬底LED光的提取效率提高了96.6％.试验中,采用软模压印技术在蓝宝石基片上大面积制备出纳米圆台图形衬底,并测得外延生长GaN层后的外延片的PL强度增加了8倍,可见纳米图形衬底对提高LED的出光效率有显著效果.

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