探讨小于1 μm自支撑聚酰亚胺薄膜的制备及其性能.以稀盐酸为腐蚀剂,对涂于氧化锌衬底上的聚酰胺酸薄膜进行剥离,经热亚胺转化为聚酰亚胺薄膜,再用准分子激光对其刻蚀减薄.采用原子力显微镜、傅里叶变换红外光谱仪和分光光度计对薄膜的微观结构和光谱性能进行了表征.结果表明,以室温下溅射的氧化锌薄膜为脱膜剂,制备了厚度约950 nm的自支撑薄膜,而激光刻蚀使聚酰亚胺薄膜厚度减薄至150 nm.厚度分别为950和150 nm薄膜的红外谱中均出现了聚酰亚胺特征吸收峰(1775、1720、1380和725 cm-1),且两者在400～2500 nm范围的平均透过率分别为80.3％和83.5％.
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