采用金属催化剂诱导化学蚀刻法首先在单晶硅片上制备出具有高长径比的纳米硅线阵列,然后通过超声振荡法将硅线阵列破碎为纳米硅线粉体,最后将其作为锂离子电池的负极材料,系统研究了金属银催化剂制备过程和各向异性化学蚀刻过程对硅片表面形貌特征的影响,发现银催化剂在蚀刻过程出现溶解/再沉积现象.通过优化AgNO3、HF、H2O2等试剂的浓度,在大面积范围内得到了高长径比的纳米硅线阵列.借助超声波的作用将硅线从硅片上切割下来,制备成纳米硅线负极进行了充放电循环测试,观察到标准的硅锂合金/去合金化反应平台,前五次循环的比容量均超过1800mAh/g.
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