采用单一液相混合源进液及闪蒸的MOCVD系统在LaA1O3(001)单晶基片上制备YBa2Cu3O7-x(YBCO)薄膜,研究混合源中Ba含量对YBCO超导薄膜成分、结构及电流承载能力的影响.结果表明,当Ba含量较小时,YBCO薄膜中易于形成尺寸较小的CuO颗粒;随着Ba含量的增加,薄膜中形成Ba2CuO3晶粒,并且Ba2CuO3晶粒尺寸随Ba含量的增加而逐渐增大.杂质相的含量、尺寸以及与YBCO的晶格匹配程度对YBCO薄膜的双轴取向生长和电流承载能力具有重要影响.当原料摩尔配比Ba/Y=3.9时,成功制备出了具有优异面内面外取向、结构致密的YBCO超导薄膜,77 K下的300 nm厚度薄膜的临界电流密度达到4.0 MA/cm2,该研究结果对于第二代涂层导体的发展具有重要意义.
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