金属辅助化学刻蚀是近些年发展起来的一种各向异性湿法刻蚀,利用该方法可以制备出高长径比的半导体一维纳米结构.本文综述了金属辅助化学刻蚀法可控制备硅纳米线的最新进展,简要概述了刻蚀的基本过程与机制,重点阐述了基于不同模板的金属辅助化学刻蚀可控制备高度有序、高长径比的硅纳米线阵列的具体流程与工艺,并介绍了其在锂离子电池、太阳能电池、气体传感检测和仿生超疏水等方面的潜在应用,探讨了目前存在的问题及其今后的研究发展方向.
参考文献
| [1] | Feng S Q,Yu D P,Zhan H Z,et al.The Growth Mechanism of Silicon Nanowires and Their Quantum Confinement Effect[J].J Cryst Growth,2000,209(2/3):513-517. |
| [2] | Au F C K,Wong K W,Tang Y H,et al.Electron Field Emission from Silicon Nanowires[J].Appl Phys Lett,1999,75(12):1700-1702. |
| [3] | Li D Y,Wu Y Y,Kim P,et al.Thermal Conductivity of Individual Silicon Nanowires[J].Appl Phys Lett,2003,83(12):2934-2936. |
| [4] | Tian B,Zheng X L,Kempa T J,et al.Coaxial Silicon Nanowires as Solar Cells and Nanoelectronic Power Sources[J].Nature(London),2007,499:885-890. |
| [5] | Jung G B,Cho Y J,Myung Y,et al.Geometry-dependent Terahertz Emission of Silicon Nanowires[J].Opt Express,2010,18:16353-16359. |
| [6] | Hagedorn K,Forgaces C,Collins S,et al.Design Considerations for Nanowire Heterojunctions in Solar Energy Conversion/Storage Applications[J].J Phys Chem C,2010,114:12010-12017. |
| [7] | Dai Y A,Chang H C,Lai K Y,et al.Subwavelength Si Nanowire Arrays for Self-cleaning Antireflection Coatings[J].J Mater Chem,2010,20:10924-10930. |
| [8] | Li H L,Zhang J,Tao B R,et al.Investigation of Capacitive Humidity Sensing Behavior of Silicon Nanowires[J].Physica E,2009,41:600-604. |
| [9] | Li X,Bohn P W.Metal-Assisted Chemical Etching in HF/H2O2 Produces Porous Silicon[J].Appl Phys Lett,2000,77:2572-2574. |
| [10] | Peng K Q,Hu J J,Yan Y J,et al.Fabrication of Single-crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles[J].Adv Funct Mater,2006,16(3):387-394. |
| [11] | Peng K Q,Fang H,Hu J J,et al.Metal-Particle-Induced,Highly Localized Site-Specific Etching of Si and Formation of Single-crystalline Si Nanowires in Aqueous Fluoride Solution[J].Chem Eur J,2006,12:7942-7947. |
| [12] | Huang Z P,Fang H,Zhu J.Fabrication of Silicon Nanowire Arrays with Controlled Diameter,Length,and Density[J].Adv Mater,2007,19:744-748. |
| [13] | Chang S W,Chuang V P,Boles S T,et al.Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated Using Block-copolymer Lithography and Metal-assisted Etching[J].Adv Funct Mater,2009,19:2495-2500. |
| [14] | Peng K Q,Zhang M L,Lu A J,et al.Ordered Silicon Nanowire Arrays via Nanosphere Lithography and Metal-induced Etching[J].Appl Phys Lett,2007,90:163123-163125. |
| [15] | Zhu K,Vinzant T B,Neale N R,et al.Removing Structural Disorder from Oriented TiO2 Nanotube Arrays:Reducing the Dimensionality of Transport and Recombination in Dye-sensitized Solar Cells[J].Nano Lett,2007,7:3739-3746. |
| [16] | Huang Z P,Zhang X X,Reiche M,et al.Extended Arrays of Vertically Aligned Sub-10 nm Diameter[100]Si Nanowires by Metal-assisted Chemical Etching[J].Nano Lett,2008,8:3046-3051. |
| [17] | Huang Z P,Shimizu T,Senz S,et al.Ordered Arrays of Vertically Aligned[110]Silicon Nanowires by Suppressing the Crystallographically Preferred ＜ 100 ＞ Etching Directions[J].Nano Lett,2009,9:2519-2525. |
| [18] | Lei Y,Chim W K.Shape and Size Control of Regularly Arrayed Nanodots Fabricated Using Ultrathin Alumina Masks[J].Chem Mater,2005,17:580-585. |
| [19] | Choi W K,Liew T H,Dawood M K.Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching[J].Nano Lett,2008,8:3799-3802. |
| [20] | Boor J,Geyer N,Wittemann J V,et al.Sub-100 nm Silicon Nanowires by Laser Interference Lithography and Metal-Assisted Etching[J].Nanotechnology,2010,21(9):5302-5036. |
| [21] | Huang Z P,Wu Y,Fang H,et al.Large-Scale Si1-xGex Quantum Dot Arrays Fabricated by Templated Catalytic Etching[J].Nanotechnology,2006,17:1476-1481. |
| [22] | Asoh H,Arai F,Ono S.Site-selective Chemical Etching of Silicon Using Patterned Silver Catalyst[J].Electrochem Commun,2007,9:535-539. |
| [23] | Boukamp B A,Lesh G C,Hug gins R A.All-Solid Lithium Electrodes with Mixed-conductor Matrix[J].J Electrochem Soc,1981,128:725-729. |
| [24] | Poizot P,Laruelle S,Grugeon S,et al.Nano-sized Transition-Metal Oxides as Negative-Electrode Materials for Lithium-ion Batteries[J].Nature,2000,407/:496-499. |
| [25] | Kasavajjula U,Wang C,Appleby A J.Nano-and Bulk-silicon-based Insertion Anodes for Lithium-ion Secondary Cells[J].J Power Sources,2007,163:1003-1039. |
| [26] | Chan C K,Peng H L,Liu G,et al.High-Performance Lithium Battery Anodes Using Silicon Nanowires[J].Nat Nanotechnol,2008,3:31-35. |
| [27] | Peng K Q,Jie J S,Zhang W J,et al.Silicon Nanowires for Rechargeable Lithium-ion Battery Anodes[J].Appl Phys Lett,2008,93(3):033105-033109. |
| [28] | Kang K,Lee H S,Han D W,et al.Maximum Li Storage in Si Nanowires for the High Capacity Three Dimensional Li-ion Battery[J].Appl Phys Lett,2010,96(5):053110-053116. |
| [29] | Huang R,Zhu J.Silicon Nanowire Array Films as Advanced Anode Materials for Lithium-ion Batteries[J].Mater Chem Phys,2010,121:519-522. |
| [30] | Sang H N,Ki S K,Shim H S,et al.Probing the Lithium Ion Storage Properties of Positively and Negatively Carved Silicon[J].Nano Lett,2011,11:3656-3662. |
| [31] | Chakrapani V,Rusli F,Filler M A,et al.Quaternary Ammonium Ionic Liquid Electrolyte for a Silicon Nanowire-based Lithium Ion Battery[J].J Phys Chem C,2011,115:22048 22053. |
| [32] | Peng K Q,Xu Y,Wu Y,et al.Aligned Single-crystalline Si Nanowire Arrays for Photovoltaic Applications[J].Sma//,2005,1(11):1062-1067. |
| [33] | Tsujino K,Matsumura M,Nishimoto Y.Texturization of Multicrystalline Silicon Wafers for Solar Cells by Chemical Treatment Using Metallic Catalyst[J].Sol Energy Mater Sol Cells,2006,90:100-110. |
| [34] | Fang H,Li X D,Song S,et al.Fabrication of Slantingly-aligned Silicon Nanowire Arrays for Solar Cell Applications[J].Nanotechnology,2008,19 (25):5703-5710. |
| [35] | Hwang Y J,Boukai A,Yang P D.High Density N-Si/N-TiO2 Core/Shell Nanowire Arrays with Enhanced Photoactivity[J].Nano Lett,2009,9:410-415. |
| [36] | Sivakov V,Andra G,Gawlik A,et al.Silicon Nanowire-based Solar Cells on Glass:Synthesis,Optical Properties,and Cell Parameters[J].Nano Lett,2009,9:1549-1554. |
| [37] | Noh J S,Kim H,KimB S,et al.High-Performance Vertical Hydrogen Sensors Using Pd-coated Rough Si Nanowires[J].J Mater Chem,2011,21:15935-15939. |
| [38] | Peng K Q,Wang X,Lee S T.Gas Sensing Properties of Single Crystalline Porous Silicon Nanowires[J].Appl Phys Lett,2009,95:243112. |
| [39] | Makal U,Uslu N,Wynne K J.Water Makes It Hydrophobic,Contraphilic Wetting for Polyurethanes with Soft Blocks Having Semifluorinated and 5,5-Dimethylhydantoin Side Chains[J].Langmuir,2007,23:209-216. |
| [40] | Cottin-Bizonne C,Barrat J L,Boequet L,et al.Low-Friction Flows of Liquid at Nanopatterned Interfaces[J].Nat Mater,2003,2:237-247. |
| [41] | Cheng S L,Chung C H,Chang Y H.Formation Kinetics and Structures of High-Density Vertical Si Nanowires on (111) Si Substrates[J].J Ceram Pro Res,2009,10 (3):243-247. |
| [42] | Sun X Z,Tao R,Lin L H,et al.Fabrication and Characterization of Polycrystalline Silicon Nanowires with Silver-assistance by Electroless Deposition[J].Appl Surf Sci,2011,257:3861-3866. |
| [43] | He Y,Jiang C Y,Yin H X,et al.Tailoring the Wettability of Patterned Silicon Surfaces with Dual-scale Pillars:from Hydrophilicity to Superhydrophobicity[J].Appl Surf Sci,2011,257:7689-7692. |
| [44] | Dawood M K,Zheng H,Liew T H.Mimicking Both Petal and Lotus Effects on a Single Silicon Substrate by Tuning the Wettability of Nanostructured Surfaces[J].Langmuir,2011,27:4126-4133. |
| [45] | Lee J P,Choi S,Park S.Extremely Superhydrophobic Surfaces with Micro-and Nanostructures Fabricated by Copper Catalytic Etching[J].Langmuir,2011,27(2):809-814. |
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