将具有低介电常数的丙烯酸酯树脂作为薄膜晶体管液晶显示器的钝化层整合到阵列基板中.与传统的SiN<,x>薄膜(ε≈7)相比,丙烯酸酯树脂钝化层具有平坦的表面,其低介电常数(ε≈4.5)可以降低器件的RC延迟,这都将有利于提高薄膜晶体管液晶显示器的开口率,从而提高显示器的亮度,降低能耗和制作成本.
A low dielectric material, acrylate resin has been investigated as a passivation dielectric layer for thin-film transistor (TFT) arrays in this paper. Compared with the con-ventional nitride film (SiN<,x>,ε≈7), the acrylate resin passivation layer exhibits a flat surface and a low dielectric constant (ε≈4. 5) which lowers the RC delay in a device. The high transrnittance and good planarization characteristics of the low dielectric acrylate resin film enhance the brightness and aperture ratio of thin film transistors liquid crystal displays (TFT-LCDs), and lower the manufacture cost.
参考文献
| [1] | 张化福,袁玉珍,臧永丽,等.p-Si TFT栅绝缘层用SiN《,bx》薄膜界面特性的研究[J].液晶与显示,2008,23(1):35-38. |
| [2] | 李云飞,王永生,张晓龙,等.a-Si:H TFT OLED驱动电路中存储电容对显示性能的影响[J].液晶与显示,2008,23(5):572-577. |
| [3] | Hori H,Suzuki K.Color Ekisho Display[M].Beijing:Science Press,2003:94-141. |
| [4] | Chang Tashan,Chang Tingchang,Liu Potsun,et al.Improvement of hydrogmated amophous-silicon TFT performances with low-k siloxane-based hydrogen silsesquioxane (HSQ) Passivation Layer[J].IEEE Electron Device Letters,2006,27(11):902-904. |
| [5] | Chang Tashan,Chang Tingchang,Liu Potsun,et al.Application of the low dielectric methyl-silsesquiazane (MSZ) as a passivation layer on TFT-LCD[J].Thin Solid Films,2006,515(3):1117-1120. |
| [6] | 何万里,曹晖,张晓光,等.丙烯酸酯封端的取代氢键液晶的制备及性能研究[J].液晶与显示,2009,24(6):783-788. |
| [7] | 张胜茂,刘文菊,田秋峰,等.低电压丙烯酸酯体系PDI.C的研究[J].液晶与显示,2009,24(6):799-803. |
| [8] | 张树旺,王华林,苗壮,等.柔性有机电致发光器件衬底阻透性能的测试方法[J].液晶与显示,2008,23(4):514-518. |
| [9] | 刘翔,王章涛,崔祥彦,等.薄膜晶体管阵列四次光刻工艺中光刻胶灰化工艺的研究[J].液晶与显示,2008,23(2):183-187. |
| [10] | 董杰,金相起,朴范求,等.a-Si TFT LCD过孔尺寸的缩减[J].液晶与显示,2008,23(6):688-691. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%