提出了一种薄膜晶体管的新结构.这种新结构充分发挥了短沟道效应和多结效应的优点.通过器件模拟,验证了此种器件结构的物理机制.通过应用这种新结构,薄膜晶体管的阈值电压、伪亚阈值斜率、开关电流比和场效应迁移率都大幅改善,并且器件的热载流子和自加热可靠性也得到了极大的改善.
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