本文研究了利用旋涂法在硅衬底上制备的聚甲基丙烯酸甲酯(PMMA)和三氟乙烯-偏氟乙烯的共聚物(P(VDF-TrFE))双层复合绝缘膜的漏电机理,采用这种膜的MIS器件的单位面积电容为32 nF/cm2.电流-电压测试结果显示在不同的电压范围内其漏电曲线出现转折点,反映了这种膜在不同的电场下有不同的漏电机制.对实验结果拟合分析表明,在0～1 V电压范围内,其漏电主要是Poole-Frenkel机制控制;在1～25 V电压范围内,主要是以肖特基发射电流为主;而在35～40 V的电压范围内,绝缘膜漏电流是空间电荷限制电流.
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