In-As-Sb-C-H五元系热力学分析与In(As,Sb) MOVPE工艺设计

1.北京科技大学材料科学与工程系,北京100083

2.北京科技大学材料科学与工程系,北京100083

3.北京科技大学材料科学与工程系,北京100083

4.北京科技大学材料科学与工程系,北京100083

关键词：热力学分析 , MOVPE , In , As , Sb , C , H

Thermodynamic Analysis of In-As-Sb-C-H Systemand Design of MOVPE Process for In(As,Sb) Semiconductor

本文模拟MOVPE工艺设定热力学条件, 建立了涉及5个相和54个气相物种的In-As-Sb-C-H五元系热力学系统. 采用先进的热力学计算方法, 对该系统进行了热力学分析. 计算结果与实验结果比较发现, 热力学计算能较好地预测系统相关系及半导体相成分.

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