硅单晶材料发展动态

1.北京有色金属研究总院,北京,100088

Development and Tendency of Silicon Crystal Material

概述了现代特大规模集成电路对硅单晶片的质量要求、直拉硅单晶生长工艺及晶片加工技术研究进展和硅单晶材料市场现状及发展趋势.

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