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在钛合金上用微等离子体氧化法制备氧化膜,用扫描电镜(SEM)、X-射线(XRD) 测其表面形貌、相组成,并对现象及测试结果进行分析,从而推理其成膜机理。

TiO2 film was prepared by micro-plasma oxidation on Ti alloy. Its surface morphologies were observed by SEM. The composition of its phase was measured by XRD. The experimental phenomenon and the measured result was analyzed. The mechanism of film-produced was proposed.

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