SiGe技术是微电子领域的前沿技术, 在硅基集成电路方面有重要应用. 介绍了SiGe/Si和SiGe-OI两种SiGeSi异质结构材料, 综述了这两种材料的制备技术和研究进展, 讨论了SiGe异质结构材料应用于纳米集成电路等的应用前景.
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