纯铝薄膜以其低声阻抗特性被广泛应用于声表面波(SAW)器件的制作.随着通讯频率的不断提高, 对SAW器件用Al薄膜的功率承受力以及与基体的附着力提出了越来越高的要求.采用少量易于反应离子刻蚀的Mo元素掺杂来改善Al合金的抗电迁移和功率承受力, 并以数纳米的Ti过渡层增强Al-Mo合金薄膜的取向性.结果表明: Ti/Al-Mo薄膜表现出强(111)织构, 与纯Al薄膜相比, 晶粒明显细化且致密均匀, 临界载荷大大增加, 与基体的附着力显著增强, 并具有良好的刻蚀性能.
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