研究了Pt/Ti/SiO2/Si基片上制备Ba0.7Sr0.3TiO3(BST7/3)薄膜时,基片加热温度和溅射功率对薄膜显微形貌和成相的影响.实验结果表明:常温下低功率溅射的BST7/3薄膜,表面形貌非常平整,但为非晶态物质的堆积;400 ℃高功率150 W溅射4 h的BST薄膜,其最大表面起伏约为40 nm;400 ℃低功率、长时间8 h溅射的BST薄膜,其表面起伏约为12 nm;说明在保证BST充分成相的前提下,可以通过控制溅射功率和时间调控BST薄膜的表面形貌,降低表面粗糙度,使之适于后续器件制备工艺.介电性能测量表明,400 ℃,75 W,8 h溅射获得的BST7/3薄膜体现出典型的位移型铁电体特征;1 kHz薄膜的损耗约为0.04.
参考文献
| [1] | Xi X X;Li Hongcheng .Oxide thin films for tunable microwave device[J].Journal of Electroceramics,2000,4(2-3):393. |
| [2] | Noda M.;Inoue K.;Ogura M.;Xu HP.;Murakami S.;Kishihara K.;Okuyama M. .An uncooled infrared sensor of dielectric bolometer mode using a new detection technique of operation bias voltage[J].Sensors and Actuators, A. Physical,2002(0):329-336. |
| [3] | Hashimotoa Kazuhiko;Xua Huaping;Mukaigawa Tomonori et al.Si monolithic microbolometers of ferroelectric BST thin film combined with readout FET for uncooled infrared image sensor[J].Sensors and Actuators A:Physical,2001,88(10) |
| [4] | Qia X Y;Yangb H;Konga X et al.Transmission electron microscopy of Ba0.7Sr0.3TiO3/YBa2Cu3O7-y epitaxial films on (001) SrTiO3 substrates[J].Journal of Crystal Growth,2004,262:353. |
| [5] | 古宏伟,杨坚,刘慧舟,屈飞,张华.YBa2Cu3O7-x涂层导体的研究进展[J].中国稀土学报,2006(03):257-268. |
| [6] | Huang Xinyou,Zhao Chen,Chen Zhigang,Gao Chunhua.Influence of Composition on Properties of Medium Temperature Sintering (Ba, Sr)TiO3 Series Capacitor Ceramics[J].稀土学报（英文版）,2006(06):777-781. |
| [7] | Gouxa L;Gervaisb M;Gervaisb F et al.Characterization of pulsed laser deposited Ba0.6 Sr0.4 TiO3 on Pt-coated silicon substrates[J].Materials Science In Semiconductor Processing,2003,5:189. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%