用射频溅射的方法在强立方织构的CeO2/YSZ/Y2O3/NiW衬底上制备了YBCO超导层. 温度、气压等因素对超导层的外延生长有重要影响. 在基片温度大于780 ℃, 气压在11～160 Pa之间, 都有NiWO4化合物生成;在退火吸氧过程中, 金属基底被氧化. 最终在温度780 ℃, 气压100 Pa的条件下, 制备出了纯(00l)取向的YBCO薄膜, 其平面内φ扫描半高宽小于10°, 超导转变温度为87.2 K, 传导电流为11 A.
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