TiZrV吸气剂的制备及吸气性能研究

稀有金属, 2009, 33(1): 39-42. doi: 10.3969/j.issn.0258-7076.2009.01.009

TiZrV吸气剂的制备及吸气性能研究

褚永俊 ^1, , 熊玉华 ^2, , 杜军 ^3, , 尉秀英 ^4, , 秦光荣 ^5,

1.北京有色金属研究总院先进电子材料研究所,北京,100088

2.北京有色金属研究总院先进电子材料研究所,北京,100088

3.北京有色金属研究总院先进电子材料研究所,北京,100088

4.北京有色金属研究总院先进电子材料研究所,北京,100088

5.北京有色金属研究总院先进电子材料研究所,北京,100088

关键词： TiZrV , 吸气剂 , 激活温度 , 吸气性能

Preparation of TiZrV Getter and Its Sorption Characteristics

采用粉末冶金的方法制备了TiZrV合金吸气剂,研究了烧结温度、激活温度和激活保温时间对吸气剂性能的影响.采用XRD测定TiZrV合金的相结构,用SEM观察烧结型TiZrV吸气剂的表面形貌,用EDS分析其表面的成分,用定压法吸气性能测试台测试其吸气性能.结果表明,TiZrV吸气剂的最佳激活温度为400 ℃,最佳烧结温度为700 ℃.

参考文献

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材料期刊网

TiZrV吸气剂的制备及吸气性能研究

Preparation of TiZrV Getter and Its Sorption Characteristics

参考文献