采用精密磨削加工工艺法制备了厚度为纳米级片状硅,以FESEM,HRTEM,EDS,SEAD及XRD等分析手段对片状纳米硅的形貌、结构及组分进行分析和表征.结果表明,所制得的片状纳米硅为纳米级片状结构,片平均厚度为10～15nm,具有立方金刚石结构.由于量子限制效应的影响,所制得的片状纳米硅的拉曼光谱发生了红移.室温下在404,495及750 nm处可观察到片状纳米硅的紫、绿、红3种光致发光谱,解释了片状纳米硅的发光机制.
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