以化学组成ZnO:Al<,2>O<,3>=98:2%的混合粉体为原料,采用热压烧结制备AZO靶材.研究了热压工艺条件对靶材致密化的影响.结果表明,热压温度与压力上升,靶材致密度增大;在AZO靶材的致密化过程中存在"反致密化"现象,这是由于连通气孔的合并与生长及闭合气孔率的升高引起的.在实验条件范围内,在热压工艺条件压力18 MPa、温度1150℃、保温保压时间90 min下.制备了AZO靶材.通过SEM观察热压靶材的断面形貌,阿基米德法测量靶材密度,水银压汞仪测量靶材的平均孔径及孔径分布,XRD测定靶材相结构,四探针测定电阻率等方法对AZO靶材的性能进行了分析表征,结果表明:结构为六方纤锌矿,密度为5.39 g·cm-<'-3>,靶材连通气孔率为0.05%,闭合气孔率为3.4%,电阻率为5.3×10<,-4>Ω·cm.采用射频溅射制备AZO薄膜,对靶材的使用性能及AZO薄膜性能进行了分析,表明靶材使用寿命大于150 W·h,薄膜在可见波段的平均透过率达到85.5%,电阻率达到3.1 x 10<,4>Ω·cm,满足薄膜太阳能对透明导电薄膜性能的要求.
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