本文采用20×20mm的YBCO/LaAlO3薄膜,采用传统的光刻技术制备出了可用于探测核磁共振的超导线圈.并且在77K的低温下测量的其f0及Q值.其f0为352MHz,Q值为150.本文还介绍了器件的设计和分析考虑、器件的加工工艺及实验结果讨论.
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