我们曾用离子注入法,脉冲激光沉积等方法制备出了HgBa2Ca2Cu3O8+δ超导薄膜.但这些方法费用昂贵,难度较大.因此我们探索利用化学雾化技术在衬底上制备HgBa2Ca2Cu3O8+δ超导薄膜.制备过程包括两个步骤:第一步控制衬底温度制备Ba-Ca-Cu-O薄膜,并退火得到Ba-Ca-Cu-O前驱物;第二步,控制衬底温度并将HgCl2喷射在Ba-Ca-Cu-O前驱物薄膜上得到Hg-Ba-Ca-Cu-O薄膜,并将所得薄膜在氧气中氧化.目前我们正在探索利用这一技术来制备Hg-1223高质量的超导薄膜.
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