利用脉冲激光沉积(PLD),制备了La2/3Sr1/3MnO3(LSMO)薄膜.然后在120 keV的能量下,进行了不同剂量(1.0×1012 ion/cm2～1.0×1017 ion/cm2)的H2+离子对LSMO薄膜的注入研究.随着注入剂量的增加,膜的电阻逐渐变大,其Tp转变温度往低温方向变化.当剂量大于等于3.0×1016 ion/cm2时,LSMO薄膜具有了类似半导体的导电行为.X射线衍射(XRD)分析发现:特征峰的位置随着剂量的增加而往低的角度偏移,并且当剂量增加到一定程度时,出现双峰现象.最后研究了LSMO薄膜其磁阻(MR)随温度和磁场的变化关系.
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