制备了具有不同应力状态的Ti/Ag双层薄膜及Ag单层膜.考察了两类薄膜的内应力状态及其对薄膜摩擦学性能的影响.试验结果表明:薄膜的应力状态对其摩擦学性能可产生明显影响.Ti/Ag双层薄膜的应力变化及其对摩擦学性能的影响比单层膜更为复杂.可以通过控制Ti中间层的膜厚来得到有利于提高薄膜摩擦学性能的应力状态.
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