用非平衡磁控溅射与等离子体源离子注入(PSII)的混合技术,研究了类金刚石碳(DLC)多层膜对1Cr18Ni9Ti钢微动磨损性能的影响.结果表明:注入N后,改性层内形成了CrN和Fe3N等氮化物相;PSII技术能够提高1Cr18Ni9Ti钢基体的微动磨损性能;试验所制备的DLC多层膜比N注入层具有更好的微动磨损性能.
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