使用原子力显微镜对由微波等离子体电子回旋共振化学气相沉积技术制备的超薄类金刚石薄膜的纳米摩擦性能进行了研究.结果表明:氢化非晶碳膜(a-C∶H)的摩擦力和外加载荷基本成线性关系,可以使用修正的Amonton公式进行表征;厚度在64.9nm以下薄膜的微观承载性能和膜厚存在明显的正比例关系.通过分析磨损深度和循环次数之间的关系以及对磨损区域的导电性研究,表明a-C∶H膜表层的微观承载性能较其内层相差很大,表面存在着一层软膜.
参考文献
| [1] | Robertson J .Diamond like amorphous carbon[J].Material Science and Engineering,2002,R37:129. |
| [2] | Bhushan B.Nanotribology and nano-mechanics of MEMS devices[A].New York:IEEE,1996:91-98. |
| [3] | Bhushan B.;Sundaram R.;Dey S.;Patton ST. .POLE TIP RECESSION STUDIES OF HARD CARBON-COATED THIN-FILM TAPE HEADS[J].Journal of Applied Physics,1996(8 Pt.2b):5916-5918. |
| [4] | Goglia P R .Diamond-like carbon appli-cations in high density hard disc recording heads[J].Diamond and Related Materials,2001,10:171. |
| [5] | 温诗铸.纳米摩擦学[M].北京:清华大学出版社,1998 |
| [6] | Huang Li-ye;Xu Ke-Wei;Lu Jian et al.Analysis of nano-scratch behavior of diamond-like carbon films[J].Surface and Coatings Technology,2002,154:236. |
| [7] | Li-Ye Huang;Jun-Wu Zhao;Ke-Wei Xu;Jian Lu .A new method for evaluating the scratch resistance of diamond-like carbon films by the nano-scratch technique[J].Diamond and Related Materials,2002(7):1454-1459. |
| [8] | Sriram Sundararajan;Bharat Bhushan .Micro/nanotribology of ultra-thin hard amorphous carbon coatings using atomic force/friction force microscopy[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,1999(1):678-689. |
| [9] | Martino C D;Demichelis F;Tagliaferro A et al.Is stress necessary to stabilise sp3 bon-ing in diamond-like carbon?[J].Diamond and Related Materials,2002,4:996. |
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