以纯金属钼与纯硅为原料,通过电弧熔炼法制备了钼、硅系金属间化合物： Mo5Si3MoSi2亚共晶和过共晶.在1200℃分别对两种合金进行了真空退火.观察层状结构在合金中的形成、变化及重构.退火48h后在亚共晶合金中发现了发展完好的Mo5Si3（D8m）/MoSi2（C11b）层状结构,层间距为几百纳米.测量了各合金退火前后的维氏硬度,研究了显微组织变化对维氏硬度的影响.
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