应用低能离子束辅助磁控溅射(IBAMS)沉积铬-铜-氮薄膜,研究了铜含量和轰击能量对薄膜结构、硬度和断裂韧度的影响.结果表明:在相同的轰击能量(400eV)下,铜含量对薄膜结构和硬度的影响不明显,但是铜的加入有利于提高薄膜的断裂韧度;离子辅助轰击能量从400 eV增加到800 eV时薄膜的结构发生了显著变化,断裂韧度和硬度均大幅度提高.
参考文献
| [1] | Veprek S;Reiprich S .A concept for the design of novel superhard coatings[J].Thin Solid Films,1995,268:64-71. |
| [2] | Musil J.;Vlcek J. .Magnetron sputtering of hard nanocomposite coatings and their properties[J].Surface & Coatings Technology,2001(0):557-566. |
| [3] | J. Musil .Hard and superhard nanocomposite coatings[J].Surface & Coatings Technology,2000(1/3):322-330. |
| [4] | 赵红雨,范秋林,宋力昕,施尔畏,胡行方.纳米复合超硬薄膜的研究现状[J].无机材料学报,2004(01):9-16. |
| [5] | Baker MA.;Kench PJ.;Joseph MC.;Tsotsos C.;Leyland A.;Matthews A. .The nanostructure and mechanical properties of PVD CrCu (N) coatings[J].Surface & Coatings Technology,2003(2/3):222-227. |
| [6] | Karvánková P;Ma nnling H-D;Eggs C et al.Thermal stability of ZrN-Ni and CrN-Ni superhard nanocomposite coatings[J].Surface and Coatings Technology,2001,146-147:280-285. |
| [7] | Leyland A.;Matthews A. .Design criteria for wear-resistant nanostructured and glassy-metal[J].Surface & Coatings Technology,2004(0):317-324. |
| [8] | J. Musil;I. Leipner;M. Kolega .Nanocrystalline and nanocomposite CrCu and CrCu-N films prepared by magnetron sputtering[J].Surface & Coatings Technology,1999(1):32-37. |
| [9] | 黄鹤,王学刚,朱晓东,陈华,何家文.离子束辅助磁控溅射沉积TiN薄膜的研究[J].稀有金属材料与工程,2002(03):205-208. |
| [10] | 何家文 .等离子体中生成薄膜及其强度[J].机械工程材料,1996,20(02):1-3. |
| [11] | 刘福田,李兆前,王志,张涛,王永国.涂层材料性能测试技术[J].机械工程材料,2002(03):1-4. |
| [12] | Mehrotra P K;Quinto D T .Techniques for evaluating mechanical properties of hard coatings[J].Journal of Vacuum Science and Technology A,1985,A3(06):2401-2405. |
| [13] | Myung HS.;Lee HM.;Shaginyan LR.;Han JG. .Microstructure and mechanical properties of Cu doped TiN superhard nanocomposite coatings[J].Surface & Coatings Technology,2003(0):591-596. |
| [14] | F.J. Espinoza-Beltran;O. Che-Soberanis;L. Garcia-Gonzalez;J. Morales-Hernandez .Effect of the substrate bias potential on crystalline grain size, intrinsic stress and hardness of vacuum arc evaporated TiN/c-Si coatings[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):170-175. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%