通过试验探索了氧化锆、氧化铝、氮化硅和碳化硅四种陶瓷球材料的性能和显微结构对加工效果的影响;采用扫描电镜观察了研磨后球的表面特征.结果表明:在相同的研磨条件下,具有长柱状晶粒的氮化硅陶瓷球加工速率最低,但圆度和表面粗糙度最容易控制;氧化锆和氧化铝陶瓷球表面质量次之,碳化硅陶瓷球加工速率最高,圆度和表面粗糙度最难控制.
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