利用离子注入法,以300keV的能量,7×1014cm-2的剂量,在室温下,对(100)InP晶体进行稀土(RE)元素Er的注入;分别在600℃、650℃、700℃、750℃、800℃温度下,采用安瓿闭管恒温退火20h.二次离子质谱仪(SIMS)观测到稀土元素Er原子在InP中的分布,直到800℃时几乎没有变化;在77K温度下,观测到InP中Er3+离子的1.54μm特征光致发光(PL)峰.提出退火温度对InP中Er3+离子的光致发光强度影响的机理.
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